About E84 standard for SEMI

Enhanced carrier transfer Parallel I / O interface specifications, that is, regulations regarding optical communication equipment in transport equipment of semiconductor manufacturing equipment.

The 8-bit parallel optical data transmission device is used in many semiconductor manufacturing lines as an optical PI / O for the interlock sequence specified in the SEMI standard E84.

Here, the precautions and explanations for communication between the automated guided vehicle (UTV, hereinafter referred to as Active) and the semiconductor manufacturing equipment (Equipment, hereinafter referred to as Passive) by optical PI / O are posted.
Please refer to it as a design aid when implementing the SEMI Standard E84.

■ Precautions for use

(1) Input / output wiring
The SEMI E84 stipulates that the optical PI / O be mounted on the Passive side load port using a 25-pin D-sub connector. (SEMI E84 / 6.4.1)
The pin assignment of the connector is as shown in .
Connect the output on the manufacturing equipment controller side to the input on the optical PI / O side, and connect the output on the optical PI / O side to the input on the manufacturing equipment controller side.

(2) "Reserved" wiring
In SEMI E84, pins 10 to 12 of the 25-pin D-sub connector are assigned to "Reserved", and suppliers are prohibited from using this freely, but the processing content is specifically described. not.

For the wiring process of this part, be sure to perform the wiring process as shown in unless there is a special instruction from the user or the carrier manufacturer.

(3) Mode setting Input line processing
Optical PI / O adopts a half-duplex bidirectional transmission method and has two operation modes, transmission standby mode and reception standby mode.

Unless otherwise specified by the user or the carrier manufacturer, the optical PI / O on the Active side is usually set to the transmission standby mode (+ VIN, POWER or OPEN), and the optical PI / O on the Passive side is set to the reception standby mode (+ VIN, POWER or OPEN). -Use as VIN, POWER, COM) (Be sure to check with the user or the carrier manufacturer just in case).

Table-1　【Pin assignment and connection of 25-pin D-sub connector used for SEMI E84】

E84 Symbol	Passive side Connector A（Female）Signal	PIN No.	Optical PI/O side Connector B（Male）Signal	Optical PI/O side Connector B（Male） Lead wire color	Remarks
L_REQ	OUT1	1	IN1	Brown
U_REQ	OUT2	2	IN2	Red
VA	OUT3	3	IN3	Orange	For Interbay and Stocker
READY	OUT4	4	IN4	Yellow
VS_0	OUT5	5	IN5	Green	For Interbay and Stocker
VS_1	OUT6	6	IN6	Blue
HO_AVBL	OUT7	7	IN7	Purple
ES	OUT8	8	IN8	Gray
（NC）		9
（Reserved）	POWER	10	SELECT	White	Passive usually controls SELECT POWER (+VIN) or OPEN (always operable)*
	POWER COM (-VIN)	11	MODE	Pink	Normally Passive is set to receive standby mode, so set POWER COM (-VIN)*
	OPEN	12	GO	White／Black	When not using the GO output, be sure to leave it open*
（NC）		13
VALID	IN1	14	OUT1	Brown／Black
CS_0	IN2	15	OUT2	Red／Black
CS_1	IN3	16	OUT3	Orange／Black
AM_AVBL	IN4	17	OUT4	Yellow／Black	For Interbay and Stocker
TR_REQ	IN5	18	OUT5	Green／Black
BUSY	IN6	19	OUT6	Blue／Black
COMPT	IN7	20	OUT7	Purple／Black
CONT	IN8	21	OUT8	Gray／Black
（NC）		22	POWER	Pink／Black	For E84-0699 and -0999, NC
	POWER	23	Shorted with pin 22	（Pink／Black）
	POWER COM	24	POWER COM	Light blue／Black	SIGNAL COM and OWER COM are shorted inside the optical PI/O
	SIGNAL COM	25	OPEN

Select from 8-bit parallel optical data transmission device, DMG series and DMS series.

The DMG series (with logging function) is an upward compatible model of the DMS series.

Since the optical communication and input / output specifications are exactly the same, if the DMS series is specified in the required specifications, the DMG series can also be used * 2.

However, on the contrary, if the DMG series is specified, the DMS series cannot be used because the logging function is required for the optical PI / O according to the required specifications.

Please select a model from the DMG series. A list of optimal optical PI / O for SEMI E84 is posted in Optimal Optical PI / O for SEMI E84.

Verification that the transfer system (program) built by your company complies with the requirements of SEMI E84 is
SEMI E84 Rehearsal tool Handheld tester “HTC-001”
and
Data transfer checker "BNC-HB1"

It works by connecting to a notebook PC and has an easy-to-see and easy-to-use interface.

We also provide detailed explanations and rent out demo machines, so please feel free to contact our sales office near you.